In addition, a hydrothermal method 22 and screen printing 23 process have been developed for thick films over 5 μm in thickness. 5 μm PZT film for d 31 and d 33 modes MEMS generators was prepared by an aerosol deposition process 21. Currently, most investigations for power generation of vibration-based PEHs focus on the configuration of cantilever unimorph beam with or without proof mass under d 31 mode and d 33 mode 20. A lot of piezoelectric energy harvesters (PEHs) specifically fabricated by MEMS technology 18, 19 have been explored recently due to its advantages of simple configuration and high output performance. However, the output power of these devices based on the first three mechanisms fabricated with complex fabrication processes cannot satisfy the power supply of electronic devices. Therefore, a variety of harvesters have been proposed to convert ambient energy into electrical energy under different mechanisms, including electromagnetic 1, 2, 3, 4, 5, electrostatic 6, 7, 8, 9, 10, triboelectric 11, 12, 13, 14, 15, 16, 17 and piezoelectric 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34 mechanisms. Wasted mechanical energy from ambient vibrations can be transformed into useful electrical power. In recent years, energy harvesting has been investigated not only to response to the global energy shortage, but also to realize potential energy supply for micro-actuators, micro-sensors, especially the devices in civilian medical, and military fields. It demonstrates that this novel proposed device can scavenge high vibration level energy at low frequency for powering the inertial sensors in internet of things application. Meanwhile, when this device is pasted on the vibrating vacuum pump, the output voltage is about 11 V. The fabricated micro generator can obtain the open-circuit stable output voltage of 61.2 V when the vibration acceleration arrives at 7.0 g. The experimental results show that the open-circuit output voltage, output power and power density of this fabricated prototype are 35 V, 321 μW and 8664 μW cm −3 at the resonant frequency of 100.8 Hz, respectively, when it matches an optimal loading resistance of 140 kΩ under the excitation of 3.0 g acceleration. In this paper, we propose a micro cantilever generator based on the bonding of bulk PZT wafer and phosphor bronze, which is fabricated by MEMS technology, such as mechanical chemical thinning and etching. Currently, most of PEHs worked under high frequency and low level vibration. Recently, piezoelectric energy harvesters (PEHs) have been paid a lot of attention by many researchers to convert mechanical energy into electrical and low level vibration.
0 Comments
Leave a Reply. |
AuthorWrite something about yourself. No need to be fancy, just an overview. ArchivesCategories |